Imirasire y'izuba

Imirasire y'izuba igabanyijemo silikoni ya kristaline na silikoni ya amorphous, muri yo hakaba hashobora kugabanywa utugingo ngengabuzima twa monocrystalline na selile polycrystalline;imikorere ya silicon monocrystalline iratandukanye nubwa silikoni ya kristaline.

Ibyiciro:

Ingirabuzimafatizo zikoreshwa mu zuba zikoreshwa cyane mu Bushinwa zishobora kugabanywamo:

Ikirahuri kimwe 125 * 125

Kirisiti imwe 156 * 156

Polycrystalline 156 * 156

Kirisiti imwe 150 * 150

Kirisiti imwe 103 * 103

Polycrystalline 125 * 125

Uburyo bwo gukora:

Igikorwa cyo gukora ingirabuzimafatizo zuba zigabanijwemo ubugenzuzi bwa silicon wafer - gutunganya hejuru no gutoranya - guhuza ikwirakwizwa - ikirahuri cya dephosphorisation silicon - plasma etching na pickling - anti-reaction coating - icapiro rya ecran - Icyaha cyihuta, nibindi bisobanuro ni ibi bikurikira:

1. Kugenzura wafer ya silicon

Wafer ya silicon niyo itwara ingirabuzimafatizo zuba, kandi ubwiza bwa waferi ya silicon bugena neza imikorere yimikorere yizuba.Kubwibyo, birakenewe kugenzura wafer ya silicon yinjira.Ubu buryo bukoreshwa cyane mugupima kumurongo wibipimo bimwe na bimwe bya tekinike ya silicon wafer, ibyo bipimo ahanini birimo ubuso bwa wafer buringaniye, ubwikorezi bwabatwara ubuzima bwabo bwose, kurwanya, ubwoko bwa P / N na microcrack, nibindi. Iri tsinda ryibikoresho bigabanijwemo gupakira no gupakurura byikora. , kwimura silicon wafer, sisitemu yo guhuza igice hamwe na bine byerekana.Muri byo, icyuma gifata amashanyarazi ya silicon wafer cyerekana ubusumbane bwubuso bwa wafer ya silicon, kandi icyarimwe ikamenya ibipimo bigaragara nkubunini na diagonal ya wafer ya silicon;micro-crack detection module ikoreshwa mugutahura micro-ibice byimbere ya silicon wafer;hiyongereyeho, hariho modules ebyiri za Detection, imwe murwego rwo kugerageza kumurongo ikoreshwa cyane cyane mugupima ubwinshi bwumubyigano wa silicon nubwoko bwa wafer ya silicon, naho ubundi module ikoreshwa mugutahura ubwikorezi buke bwubuzima bwa silicon.Mbere yo gutahura ubwikorezi bwabatwara ubuzima bwabo bwose no kurwanya, birakenewe ko tumenya diagonal na micro-crack ya wafer ya silicon, hanyuma ugahita ukuraho wafer ya silicon yangiritse.Ibikoresho byo kugenzura bya silicon birashobora guhita bipakurura no gupakurura waferi, kandi birashobora gushyira ibicuruzwa bitujuje ibyangombwa mumwanya uhamye, bityo bikanoza neza ubugenzuzi no gukora neza.

2. Ubuso bwanditse

Gutegura imiterere ya silicon monocrystalline nugukoresha anisotropic etching ya silicon kugirango ube miriyoni ya piramide ya tetrahedral, ni ukuvuga piramide, hejuru ya santimetero kare ya silikoni.Bitewe no gutekereza kwinshi no kugabanya urumuri rwabaye hejuru, kwinjiza urumuri biriyongera, kandi imiyoboro ngufi-yumuzunguruko no guhindura imikorere ya bateri iratera imbere.Umuti wa anisotropic etching ya silicon mubisanzwe ni igisubizo gishyushye cya alkaline.Alkalis iboneka ni sodium hydroxide, hydroxide ya potasiyumu, hydroxide ya lithium na Ethylenediamine.Hafi ya silike ya silike itegurwa hifashishijwe igisubizo kidahenze cya hydroxide ya sodium hamwe nubushuhe bwa 1%, naho ubushyuhe bwa etching ni 70-85 ° C.Kugirango ubone suede imwe, alcool nka Ethanol na isopropanol nayo igomba kongerwaho igisubizo nkibikoresho bigoye kugirango byihute kwangirika kwa silicon.Mbere yuko suede itegurwa, wafer ya silicon igomba gukorerwa hejuru yubutaka bwambere, kandi nka 20-25 mm zashizwemo umuti wa alkaline cyangwa acide.Suede imaze gushiramo, hakorwa isuku rusange yimiti.Waferi yateguwe hejuru ya silicon ntigomba kubikwa mumazi igihe kinini kugirango wirinde kwanduza, kandi igomba gukwirakwizwa vuba bishoboka.

3. Ipfundo

Imirasire y'izuba ikenera ahantu hanini PN kugirango imenye ihinduka ryingufu zumucyo ningufu zamashanyarazi, kandi itanura rya diffuzione ni ibikoresho bidasanzwe byo gukora PN ihuza ingirabuzimafatizo zuba.Itanura ryo gukwirakwiza tubular rigizwe ahanini nibice bine: ibice byo hejuru no hepfo yubwato bwa quartz, icyumba cya gaze isohoka, igice cyumubiri w itanura nigice cya kabine.Diffusion muri rusange ikoresha fosifore oxychloride yamazi nkisoko yo gukwirakwiza.Shyira wa bwoko bwa silicon wafer muri kontineri ya quartz yo mu itanura rya tubular diffusion, hanyuma ukoreshe azote kugirango uzane fosifore oxychloride mu kintu cya quartz ku bushyuhe bwinshi bwa dogere selisiyusi 850-900.Fosifore oxychloride ifata hamwe na silicon wafer kugirango ibone fosifore.atom.Nyuma yigihe runaka, atome ya fosifore yinjira murwego rwo hejuru rwa wafer ya silicon kuva impande zose, hanyuma ikinjira kandi ikwirakwizwa muri wafer ya silicon binyuze mu cyuho kiri hagati ya atome ya silicon, ikora intera iri hagati ya N-semiconductor ya N na P- andika igice cya kabiri, ni ukuvuga ihuriro rya PN.Ihuriro rya PN ryakozwe nubu buryo rifite uburinganire bwiza, kudahuza ibipapuro birwanya munsi ya 10%, kandi ubuzima bwabatwara buke burashobora kurenza 10m.Ihimbano rya PN ninzira yibanze kandi ikomeye mubikorwa byizuba.Kuberako aribwo buryo bwo guhuza PN, electron nu mwobo ntibisubira aho byahoze nyuma yo gutemba, kugirango habeho umuyoboro, kandi umuyoboro ukururwa ninsinga, ikaba ari umuyoboro utaziguye.

4. Dephosphorylation silikate ikirahure

Ubu buryo bukoreshwa mubikorwa byo kubyara izuba.Mugukata imiti, wafer ya silicon yibizwa mumuti wa hydrofluoric aside kugirango habeho reaction yimiti kugirango itange umusemburo wa elegitoronike ya hexafluorosilicic kugirango ukureho sisitemu yo gukwirakwiza.Igice cyikirahuri cya fosifosilike cyakozwe hejuru yubutaka bwa silicon nyuma yo guhuza.Mugihe cyo gukwirakwiza, POCL3 ikorana na O2 ikora P2O5 ishyirwa hejuru ya wafer ya silicon.P2O5 ifata hamwe na Si kubyara atome ya SiO2 na fosifore, Muri ubu buryo, urwego rwa SiO2 rurimo ibintu bya fosifore ruba hejuru ya wafer ya silicon, bita ikirahuri cya fosifosilike.Ibikoresho byo gukuraho ibirahuri bya fosifori ya silikatike muri rusange bigizwe numubiri nyamukuru, ikigega cyogusukura, sisitemu yo gutwara servo, ukuboko kwa mashini, sisitemu yo kugenzura amashanyarazi na sisitemu yo gukwirakwiza aside.Amashanyarazi nyamukuru ni acide hydrofluoric, azote, umwuka ucanye, amazi meza, umuyaga ushushe n'amazi.Acide Hydrofluoric ishonga silika kuko aside hydrofluoric ikora hamwe na silika kugirango itange gaze ya silicon tetrafluoride ihindagurika.Niba aside hydrofluoric irenze urugero, tetrafluoride ya silicon yakozwe na reaction izakomeza kwitwara hamwe na aside hydrofluoric kugirango ibe ingirabuzimafatizo, acide hexafluorosilicic.

5. Kurwara plasma

Kubera ko mugihe cyo gukwirakwiza, niyo byemewe gukwirakwizwa inyuma, fosifore byanze bikunze ikwirakwizwa hejuru yimiterere yose harimo impande za silicon wafer.Amafoto ya elegitoronike yakusanyirijwe kuruhande rwimbere rwihuriro rya PN azatembera kumpande aho fosifore ikwirakwizwa kuruhande rwinyuma rwihuriro rya PN, bigatera uruziga rugufi.Kubwibyo, silikoni ikozwe hafi yizuba ryizuba igomba gushyirwaho kugirango ikureho PN ihuriro ryumudugudu.Ubu buryo busanzwe bukorwa hakoreshejwe tekinoroji yo gutera plasma.Gutera plasma biri muburyo bwumuvuduko muke, molekile yababyeyi ya gaze ya reaction CF4 ishimishwa nimbaraga za radiyo yumurongo kugirango itange ionisation kandi ikore plasma.Plasma igizwe na electron zishizwemo na ion.Ingaruka za electron, gaze mucyumba cya reaction irashobora gukuramo ingufu no gukora umubare munini wamatsinda akora usibye guhinduka ion.Amatsinda akora yibikorwa bigera hejuru ya SiO2 kubera gukwirakwizwa cyangwa munsi yumurima wamashanyarazi, aho bitwara imiti hamwe nubuso bwibikoresho bigomba guterwa, kandi bigakora ibicuruzwa bihindagurika bitandukana nubuso bwibintu bigomba kuba byashizwemo, kandi bisohorwa mu cyuho na sisitemu ya vacuum.

6. Igipfundikizo cyo kurwanya

Kugaragaza hejuru ya silicon isize ni 35%.Kugirango ugabanye kugaragarira hejuru no kunoza imikorere ya selile, birakenewe kubitsa urwego rwa silicon nitride anti-reaction.Mu nganda zikora inganda, ibikoresho bya PECVD bikoreshwa kenshi mugutegura firime zirwanya ibitekerezo.PECVD ni plasma yazamuye imyuka ya chimique.Ihame ryayo rya tekiniki ni ugukoresha plasma yubushyuhe buke nkisoko yingufu, icyitegererezo gishyirwa kuri cathode yumuriro wa glow munsi yumuvuduko muke, gusohora glow bikoreshwa mugushyushya icyitegererezo ubushyuhe bwateganijwe, hanyuma umubare ukwiye wa imyuka ikora SiH4 na NH3 iratangizwa.Nyuma yuruhererekane rwibintu bya chimique na plasma reaction, firime-ikomeye, ni ukuvuga firime nitride ya silicon, ikorwa hejuru yicyitegererezo.Muri rusange, umubyimba wa firime wabitswe nubu buryo bwa plasma bwongerewe imbaraga mumashanyarazi ni 70 nm.Filime yubu bunini ifite imikorere ya optique.Ukoresheje ihame ryo kwivanga kwa firime yoroheje, kwerekana urumuri birashobora kugabanuka cyane, imiyoboro ngufi yumuzunguruko nibisohoka bya batiri byiyongereye cyane, kandi imikorere nayo iratera imbere cyane.

7. icapiro rya ecran

Imirasire y'izuba imaze kunyura muburyo bwo guhinduranya, gukwirakwiza na PECVD, hashyizweho ihuriro rya PN, rishobora kubyara amashanyarazi munsi yo kumurika.Kugirango wohereze ibicuruzwa byakozwe, birakenewe gukora electrode nziza kandi mbi hejuru ya bateri.Hariho uburyo bwinshi bwo gukora electrode, kandi icapiro rya ecran nuburyo bukoreshwa cyane mugukora amashanyarazi akomoka ku mirasire y'izuba.Icapiro rya ecran nugucapa igishushanyo cyateganijwe kuri substrate hakoreshejwe gushushanya.Ibikoresho bigizwe nibice bitatu: icapiro rya silver-aluminium inyuma ya bateri, icapiro rya aluminiyumu inyuma ya bateri, no gucapa ifeza-paste imbere ya bateri.Ihame ryakazi ryayo ni: koresha mesh yuburyo bwa ecran kugirango winjire mubitotsi, shyira igitutu runaka kumurongo wigice cya ecran hamwe na scraper, hanyuma wimuke werekeza kurundi ruhande rwa ecran icyarimwe.Irangi ryakuwe muri mesh yigice cyigishushanyo kuri substrate na sikete uko igenda.Bitewe ningaruka zifatika za paste, icyapa gishyizwe mumurongo runaka, kandi igikoma gihora gihuza umurongo na plaque ya ecran hamwe na substrate mugihe cyo gucapa, kandi umurongo wo guhuza ugenda hamwe nigikorwa cyo gukanda kugirango urangire icapiro.

8. gucumura vuba

Mugaragaza-yacapishijwe silicon wafer ntishobora gukoreshwa muburyo butaziguye.Igomba guhita yinjizwa mu itanura ryacanwe kugirango itwike ingirabuzimafatizo ya resin, hasigara electrode hafi ya feza yuzuye ifatanye neza na wafer ya silicon kubera ibikorwa byikirahure.Iyo ubushyuhe bwa electrode ya feza hamwe na silikoni ya kristaline igeze ku bushyuhe bwa eutectic, atome ya silicon silicon yinjizwa mubintu bya elegitoronike ya elegitoronike ya elegitoronike yashizwemo ku rugero runaka, bityo bigatuma habaho ihuzwa rya ohmic ya electrode yo hejuru no hepfo, kandi igateza imbere uruziga rufunguye. voltage no kuzuza ibintu bya selile.Ibyingenzi byingenzi nugukora bifite ibiranga kurwanya kunoza imikorere ya selile.

Itanura ryo gucumura rigabanyijemo ibyiciro bitatu: mbere yo gucumura, gucumura, no gukonja.Intego yicyiciro kibanziriza gucumura ni ukubora no gutwika ibyuma bya polymer mubitotsi, kandi ubushyuhe buzamuka buhoro buhoro muriki cyiciro;murwego rwo gucumura, reaction zitandukanye zumubiri nubumara zirangizwa mumubiri wacumuye kugirango habeho imiterere ya firime irwanya, bigatuma irwanya rwose., ubushyuhe bugera ku mpinga muri iki cyiciro;murwego rwo gukonjesha no gukonjesha, ikirahure kirakonja, kirakomera kandi kirakomera, kuburyo imiterere ya firime irwanya gukomera neza kuri substrate.

9. Abaperefe

Muri gahunda yo kubyaza umusaruro selile, ibikoresho bya peripheri nko gutanga amashanyarazi, amashanyarazi, gutanga amazi, amazi, HVAC, vacuum, hamwe na parike idasanzwe nabyo birakenewe.Kurinda umuriro n'ibikoresho byo kurengera ibidukikije nabyo ni ingenzi cyane kugirango umutekano n'iterambere rirambye.Ku murongo utanga ingufu zituruka ku mirasire y'izuba hamwe n'umusaruro wa buri mwaka wa 50MW, gukoresha ingufu z'ibikorwa n'ibikoresho by'amashanyarazi byonyine ni nka 1800KW.Ingano y’amazi meza ni toni 15 mu isaha, kandi ibisabwa by’amazi byujuje ubuziranenge bwa EW-1 bwa tekiniki y’amazi yo mu rwego rw’ikoranabuhanga mu Bushinwa GB / T11446.1-1997.Ingano yo gukonjesha amazi nayo igera kuri toni 15 kumasaha, ingano yubunini bwamazi ntigomba kurenza mikoro 10, kandi ubushyuhe bwo gutanga amazi bugomba kuba 15-20 ° C.Umuvuduko mwinshi wa vacuum ni 300M3 / H.Muri icyo gihe, harasabwa kandi metero kibe 20 z'ibigega byo kubika azote na metero kibe 10 z'ibigega bya ogisijeni.Urebye ibintu byumutekano wa gaze zidasanzwe nka silane, birakenewe kandi gushiraho icyumba cyihariye cya gaze kugirango umutekano wibyakozwe rwose.Byongeye kandi, iminara yo gutwika ya silane hamwe na sitasiyo zitunganya imyanda nabyo ni ibikoresho nkenerwa mu gukora selile.